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1200°C三溫區(qū)九通道混氣高真空CVD系統(tǒng) OTF-1200X-4-III-9HV-

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1200°C三溫區(qū)九通道混氣高真空CVD系統(tǒng) OTF-1200X-4-III-9HV-

詳細介紹

GSL-1700X-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.

技術參數(shù)
Furnace Structure	● Double layer steel casing with air cooling ● Two cooling fans inside to keep case temperature < 55oC. ● 內(nèi)爐膛表面涂有美國進口的高溫氧化鋁涂層可以提高設備的加熱效率，同時也可以延長爐膛的使用壽命 ● High purity Alumina refractory chamber ● Vacuum and gas mixing system is located in bottom cart with 4 wheel ● Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use
Power	6 Kw
Voltage	AC 208-240V Single Phase, 50/60 Hz
Heating Element	8 pcs1800°C grade MoSi2 heating element
Max. Temperature	1700°C(< 1 hours )
Continuous Temperature	1600°C
Max. Heating Rate	≤5°C/min
Tube Size and Materials	● Premier Grade alumina tube made in USA ● （標配尺寸） ( 60mm) O.D.x I.D. (54mm) x 1000mm Length ● （選配尺寸） ( 80mm) O.D.x I.D. (74mm) x 1000mm Length ● Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).
Heating Zone	● Heating zone length: 457 mm (18") ● Constant Temperature Zone length: 150 mm (6")(+/-1oC) 注：由于測量手段及外部環(huán)境的影響，測量結果可能會有偏差，此參數(shù)僅供參考不作為該設備的技術指標。您購買產(chǎn)品需要準確的恒溫區(qū)數(shù)據(jù)，請與我公司銷售人員聯(lián)系
Temperature controllers	● One precision digital temperature controller programmable with 50 segments. ● PID adjustable with auto tune function to ensure temperature stability within +/- 1°C. 控溫儀表操作視頻 ● Full protection in each controller for over-temperature and broken thermal couple.
Thermal Couple	B type thermal couples built in
Vacuum Flanges	● Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve ● Double high temperature silicone O-ring for using under 300°C ● Porous alumina blocks included for protecting flange from heat radiation
Vacuum pumps	Tow stages vacuum pump installed in bottom case: ● One Double Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10-2 torr. ● One turbo molecular pump with max. vacuum pressure of 2x10-5 torr. ● One precision vacuum sensor installed. ● Stainless steel hose tube is included for connecting to tube furnace ● Digital vacuum meter / controller installed
Vacuum Sensor & display	● Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display. ● Vacuum controller and display areinstalled in bottom cart
Gas flow meter User Manual (Click to download)	● 9 precision mass flow meters (CS200) controllers are installed in bottom cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-99% of full scale) ● 3 MFC at range 0 - 1000scc ● 3 MFC at range 0 - 200scc ● 3 MFC at range 0 - 10 scc ● one floating meter will be installed for N2 gas only ● one mechanical pressure meters are installed in bottom cart for monitor each gas 's pressure in mixer. ● 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below. Software and interface (optional at extra cost). Please click uderline for software operation instruction
Pipe connection, valves and gas mixer	● SS 316 1/4" pipe/fitting ● SS 316 vacuum needle valves ● 21 sets of stainless steel vacuum valves are installed outside of right side panel of cabinet to control, vacuum pump, flowing gases and two inlet gases separately. ● Please click here to see sketch of pipe connection.
Dimension	Furnace: 550 x 380 x 520 Bottom case: 600x600x597
Net Weight	about 100 kg
Shipping weight	200 Lbs
Shipping package size after crating	Two cases in one plastic pallet: 45x45x35/case
Warranty & certificate	● One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.) ● CE Certificate