-2 Remarkable Solutions-MUMU-X Series

Power Consumption 0.35kWExtreamly Small Footprint

01
FEATURE

Roots dry pump achieved smallest energy consumption & footprint in the category.

02
FEATURE

Applicable for various tools.

03
FEATURE

Best for clean pumping such as L/L
ａnd transfer chamber, etc.

Major Products

Spec. / ProductsMU100XMU180XMU300XMU600XMU1200XMU20M18X
Max. pumping speed
[L/min] *1		1,6603,0005,00010,00020,00030,000
Ultimate pressure
[Pa] *1		1.50.5
Supply voltage
(50/60Hz)		3Phase AC200～220V *2
Power consumption
[kW] *3		0.350.50.550.60.71.5
Dimensions [mm]
W*H*L *4		W:230
H:275
L:450		W:280
H:299
L:550		W:230
H:520
L:450		W:230
H:520
L:530		W:275
H:580
L:625		W:500
H:950
L:1100
Mass [kg]6095100120165340

*1) Without N2 purge. *2) Contact us for other voltage options. *3) Approx. value at ultimate pressure. *4) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* Contact us about large capacity pumps.

S-P Curve

S-P Curve